Electrical properties of titanium nitride films synthesized by reactive magnetron sputtering
نویسندگان
چکیده
منابع مشابه
Decorative Titanium Nitride Colored Coatings on Bell-Metal by Reactive Cylindrical Magnetron Sputtering
The transition metal nitrides like titanium nitride exhibit very interesting color variation properties depending on the different plasma deposition conditions using cylindrical magnetron sputtering method. It is found in this deposition study that nitrogen partial pressure in the reactive gas discharge environment plays a significant role on the color variation of the film coatings on bell-met...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2017
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/927/1/012036